Fabrication of High-Performance Bridged-Grain Polycrystalline Silicon TFTs by Laser Interference Lithography
Deng, Sunbin, Chen, Rongsheng, Zhou, Wei, Ho, Jacob Yeuk Lung, Wong, Man, Kwok, Hoi-SingYear:
2016
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2016.2520081
File:
PDF, 1.49 MB
english, 2016