Micro catalytic methane sensors based on 3D quartz...

Sensors and Actuators A: Physical 2016 / 05 Vol. 242

Micro catalytic methane sensors based on 3D quartz structures with cone-shaped cavities etched by high-resolution abrasive sand blasting

Lu, Wenshuai, Jing, Gaoshan, Bian, Xiaomeng, Yu, Hongyan, Cui, Tianhong
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Volume:
242
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2016.02.017
Date:
May, 2016
File:
PDF, 2.95 MB
english, 2016
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