![](/img/cover-not-exists.png)
3D LTCC structure for a large-volume cavity-type chemical microreactor
Agata Skwarek, Dr, Belavič, Darko, Hrovat, Marko, Makarovič, Kostja, Dolanč, Gregor, Pohar, Andrej, Hočevar, Stanko, Malič, BarbaraVolume:
32
Language:
english
Journal:
Microelectronics International
DOI:
10.1108/MI-01-2015-0011
Date:
August, 2015
File:
PDF, 275 KB
english, 2015