![](/img/cover-not-exists.png)
Electrostatic microactuator and design considerations for HDD applications
Fan, L.-S., Hirano, T., Hong, J., Webb, P.R., Juan, W.H., Lee, W.Y., Chan, S., Semba, T., Imaino, W., Pan, T.S., Pattanaik, S., Lee, F.C., McFadyen, I., Arya, S., Wood, R.Volume:
35
Language:
english
Journal:
IEEE Transactions on Magnetics
DOI:
10.1109/20.753823
Date:
March, 1999
File:
PDF, 937 KB
english, 1999