Electrostatic microactuator and design considerations for...

Electrostatic microactuator and design considerations for HDD applications

Fan, L.-S., Hirano, T., Hong, J., Webb, P.R., Juan, W.H., Lee, W.Y., Chan, S., Semba, T., Imaino, W., Pan, T.S., Pattanaik, S., Lee, F.C., McFadyen, I., Arya, S., Wood, R.
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Volume:
35
Language:
english
Journal:
IEEE Transactions on Magnetics
DOI:
10.1109/20.753823
Date:
March, 1999
File:
PDF, 937 KB
english, 1999
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