Interactions of Adhesion Materials and Annealing Environment on Resistance and Stability of MEMS Platinum Heaters and Temperature Sensors
Yi, Feng, Osborn, William, Betz, Jordan, LaVan, David A.Volume:
24
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2015.2394483
Date:
August, 2015
File:
PDF, 10.18 MB
english, 2015