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Interactions of Adhesion Materials and Annealing...

Interactions of Adhesion Materials and Annealing Environment on Resistance and Stability of MEMS Platinum Heaters and Temperature Sensors

Yi, Feng, Osborn, William, Betz, Jordan, LaVan, David A.
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Volume:
24
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2015.2394483
Date:
August, 2015
File:
PDF, 10.18 MB
english, 2015
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