Tip Motion—Sensor Signal Relation for a Composite SPM/SPL...

Journal of Microelectromechanical Systems 2016 / 2 Vol. 25; Iss. 1

Tip Motion—Sensor Signal Relation for a Composite SPM/SPL Cantilever

Roeser, Dennis, Gutschmidt, Stefanie, Sattel, Thomas, Rangelow, Ivo W.
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Volume:
25
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2015.2482389
Date:
February, 2016
File:
PDF, 3.20 MB
english, 2016
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