Aluminum Nitride Cross-Sectional Lamé Mode Resonators
Cassella, Cristian, Hui, Yu, Qian, Zhenyun, Hummel, Gwendolyn, Rinaldi, MatteoYear:
2016
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2015.2512379
File:
PDF, 2.27 MB
english, 2016