Nanoimprint Fabrication of Slot Waveguides

Nanoimprint Fabrication of Slot Waveguides

Hiltunen, M., Heinonen, E., Hiltunen, J., Puustinen, J., Lappalainen, J., Karioja, P.
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Volume:
5
Language:
english
Journal:
IEEE Photonics Journal
DOI:
10.1109/jphot.2013.2251876
Date:
April, 2013
File:
PDF, 711 KB
english, 2013
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