The Manipulation of Temperature Coefficient Resistance of...

IEEE Electron Device Letters 2015 / 3 Vol. 36; Iss. 3

The Manipulation of Temperature Coefficient Resistance of TaN Thin-Film Resistor by Supercritical CO2 Fluid

Chen, Huey-Ru, Chen, Ying-Chung, Chang, Ting-Chang, Chang, Kuan-Chang, Tsai, Tsung-Ming, Chu, Tian-Jian, Shih, Chih-Cheng, Tseng, Yi-Ting, Lin, Chih-Yang, Lin, Hua-Ching
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Volume:
36
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2015.2396196
Date:
March, 2015
File:
PDF, 553 KB
english, 2015
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