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[IEEE Oper. Center 2003 International Semiconductor Conference. CAS 2003 - Sinaia, Romania (28 Sept.-2 Oct. 2003)] 2003 International Semiconductor Conference. CAS 2003 Proceedings (IEEE Cat. No.03TH8676) - Ultimate lithography using proximal probes for single electron device fabrication or nano-object addressing
Tonneau, D., Clement, N., Houel, A., Dallaporta, H., Safarov, V.Year:
2003
Language:
english
DOI:
10.1109/smicnd.2003.1251335
File:
PDF, 620 KB
english, 2003