SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Optical Measurement Systems for Industrial Inspection VIII - Application of line-scanning microscopy using a linear sensor in semiconductor industry: shape and thickness measurements
Macedo, Milton P., Lehmann, Peter H., Osten, Wolfgang, Correia, C. M. B. A., Albertazzi, ArmandoVolume:
8788
Year:
2013
Language:
english
DOI:
10.1117/12.2020244
File:
PDF, 717 KB
english, 2013