SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Optical Measurement Systems for Industrial Inspection VIII - Measurement, visualization and analysis of extremely large data sets with a nanopositioning and nanomeasuring machine
Birli, O., Lehmann, Peter H., Osten, Wolfgang, Franke, K.-H., Linß, G., Albertazzi, Armando, Machleidt, T., Manske, E., Schale, F., Schwannecke, H.-C., Sparrer, E., Weiß, M.Volume:
8788
Year:
2013
Language:
english
DOI:
10.1117/12.2020538
File:
PDF, 1.45 MB
english, 2013