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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Optical Microlithography XXVIII - Experiments using automated sample plan selection for OPC modeling
Lai, Kafai, Erdmann, Andreas, Viswanathan, Ramya, Jaiswal, Om, Casati, Nathalie, Abdo, Amr, Oberschmidt, James, Watts, Josef, Gabrani, MariaVolume:
9426
Year:
2015
Language:
english
DOI:
10.1117/12.2086049
File:
PDF, 2.36 MB
english, 2015