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SPIE Proceedings [SPIE International Symposium on Precision Engineering Measurement and Instrumentation - Changsha/Zhangjiajie, China (Friday 8 August 2014)] Ninth International Symposium on Precision Engineering Measurement and Instrumentation - A displacement measuring system based on grating double diffraction
Cui, Junning, Tan, Jiubin, Wen, Xianfang, Zhao, Bo, Wang, Lei, Xu, Min-er, Zhao, Hong, Liu, Xiang-dongVolume:
9446
Year:
2015
Language:
english
DOI:
10.1117/12.2182024
File:
PDF, 716 KB
english, 2015