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SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 9 August 2015)] Optical Manufacturing and Testing XI - Fabrication and qualification of roughness reference samples for industrial testing of surface roughness levels below 0.5 nm Sq
Fähnle, Oliver W., Williamson, Ray, Kim, Dae Wook, Faehnle, O., Langenbach, E., Zygalsky, F., Frost, F., Fechner, R., Schindler, A., Cumme, M., Biskup, H., Wünsche, C., Rascher, R.Volume:
9575
Year:
2015
Language:
english
DOI:
10.1117/12.2189790
File:
PDF, 525 KB
english, 2015