SPIE Proceedings [SPIE Applied Optics and Photonics China (AOPC2015) - Beijing, China (Tuesday 5 May 2015)] AOPC 2015: Micro/Nano Optical Manufacturing Technologies; and Laser Processing and Rapid Prototyping Techniques - Echelle and etalon used for spectral metrology of excimer laser lithographic light sources at 193nm

The file will be sent to you via the Telegram messenger. It may take up to 1-5 minutes before you receive it.

Note: Make sure you have linked your account to Z-Library Telegram bot.

The file will be sent to your Kindle account. It may take up to 1–5 minutes before you receive it.

Please note: you need to verify every book you want to send to your Kindle. Check your mailbox for the verification email from Amazon Kindle.