SPIE Proceedings [SPIE SPIE Scanning Microscopies -...

  • Main
  • SPIE Proceedings [SPIE SPIE Scanning...

SPIE Proceedings [SPIE SPIE Scanning Microscopies - Monterey, California, United States (Tuesday 29 September 2015)] Scanning Microscopies 2015 - Photomask linewidth comparison by PTB and NIST

Postek, Michael T., Newbury, Dale E., Platek, S. Frank, Maugel, Tim K., Bergmann, D., Bodermann, B., Bosse, H., Buhr, E., Dai, G., Dixson, R., Häßler-Grohne, W., Hahm, K., Wurm, M.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
9636
Year:
2015
Language:
english
DOI:
10.1117/12.2199453
File:
PDF, 482 KB
english, 2015
Conversion to is in progress
Conversion to is failed