SPIE Proceedings [SPIE SPIE Scanning Microscopies - Monterey, California, United States (Tuesday 29 September 2015)] Scanning Microscopies 2015 - Photomask linewidth comparison by PTB and NIST
Postek, Michael T., Newbury, Dale E., Platek, S. Frank, Maugel, Tim K., Bergmann, D., Bodermann, B., Bosse, H., Buhr, E., Dai, G., Dixson, R., Häßler-Grohne, W., Hahm, K., Wurm, M.Volume:
9636
Year:
2015
Language:
english
DOI:
10.1117/12.2199453
File:
PDF, 482 KB
english, 2015