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SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 13 February 2016)] Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XVI - Ablation of silicon with bursts of femtosecond laser pulses
Heisterkamp, Alexander, Herman, Peter R., Meunier, Michel, Nolte, Stefan, Gaudiuso, Caterina, Kämmer, Helena, Dreisow, Felix, Ancona, Antonio, Tünnermann, Andreas, Nolte, StefanVolume:
9740
Year:
2016
Language:
english
DOI:
10.1117/12.2212609
File:
PDF, 475 KB
english, 2016