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SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX, United States (Wednesday 25 October 1995)] Microelectronic Manufacturing Yield, Reliability, and Failure Analysis - In-situ Si wafer temperature measuring using pulse-modulated infrared laser interferometric thermometry for CVD film deposition
Kurosaki, Ryo, Kikuchi, Jun, Kobayashi, Yasuo, Chinzei, Yasuhiko, Fujimura, Shuzo, Horiike, YasuhiroVolume:
2635
Year:
1995
Language:
english
DOI:
10.1117/12.221454
File:
PDF, 244 KB
english, 1995