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SPIE Proceedings [SPIE Optical Systems Design 2005 - Jena, Germany (Monday 12 September 2005)] Optical Fabrication, Testing, and Metrology II - Development of a nanoscale linewidth-standard for high-resolution optical microscopy
Huebner, Uwe, Morgenroth, W., Boucher, R., Mirandé, W., Buhr, E., Fries, Th., Schwarz, Nadine, Kunath-Fandrei, G., Hild, R.Volume:
5965
Year:
2005
Language:
english
DOI:
10.1117/12.625194
File:
PDF, 2.36 MB
english, 2005