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SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, CA (Sunday 2 August 2009)] Optical Manufacturing and Testing VIII - Fabrication of 300-mm silicon reference wafer by using direct laser writer
Rhee, Hyug-Gyo, Burge, James H., Fähnle, Oliver W., Kim, Dong-Ik, Hong, Seung-Ki, Williamson, Ray, Song, Jae-Bong, Lee, Yun-WooVolume:
7426
Year:
2009
Language:
english
DOI:
10.1117/12.824846
File:
PDF, 1.17 MB
english, 2009