SPIE Proceedings [SPIE SPIE Defense, Security, and Sensing - Orlando, Florida (Monday 5 April 2010)] Micro- and Nanotechnology Sensors, Systems, and Applications II - Science and technology of MEMS/NEMS resonators: Si versus diamond platform materials
Xiong, Mingke, George, Thomas, Islam, M. Saif, Wu, I-Tsang, Wei, Mian, Dutta, Achyut K., Wang, JingVolume:
7679
Year:
2010
Language:
english
DOI:
10.1117/12.852893
File:
PDF, 8.11 MB
english, 2010