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SPIE Proceedings [SPIE Seventh International Symposium on Precision Engineering Measurements and Instrumentation - Yunnan, China (Sunday 7 August 2011)] Seventh International Symposium on Precision Engineering Measurements and Instrumentation - Development and calibration of a compact self-sensing atomic force microscope head for micro-nano characterization
Guo, Tong, Fan, Kuang-Chao, Song, Man, Wang, Siming, Zhao, Jian, Lu, Rong-Sheng, Chen, Jinping, Fu, Xing, Hu, XiaotangVolume:
8321
Year:
2011
Language:
english
DOI:
10.1117/12.905322
File:
PDF, 2.00 MB
english, 2011