Formation of Mosaic Silicon Oxide Structure during...

Journal of Electronic Materials 2016 / 5 Vol. 45; Iss. 5

Formation of Mosaic Silicon Oxide Structure during Metal-Assisted Electrochemical Etching of Silicon at High Current Density

Cao, Dao Tran, Anh, Cao Tuan, Ngan, Luong Truc Quynh
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Volume:
45
Language:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-016-4434-4
Date:
May, 2016
File:
PDF, 1.39 MB
english, 2016
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