[IEEE 2015 13th International Conference The Experience of Designing and Application of CAD Systems in Microelectronics (CADSM) - Lviv - Polyana, Ukraine (2015.2.24-2015.2.27)] The Experience of Designing and Application of CAD Systems in Microelectronics - Research of the tense-deformed state of elastic element of micropompe and determination of its functionlies

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