[IEEE 2014 IEEE 2nd International Conference on Emerging Electronics (ICEE) - Bengaluru, India (2014.12.3-2014.12.6)] 2014 IEEE 2nd International Conference on Emerging Electronics (ICEE) - Influence of growth paramaters on the crystallinity and stress of SiGe films grown by LPCVD
Suresh, Madhuri, Penmetsa, Siva, Savitha, PYear:
2014
Language:
english
DOI:
10.1109/icemelec.2014.7151158
File:
PDF, 376 KB
english, 2014