[IEEE 2014 IEEE Sensors - Valencia, Spain...

  • Main
  • [IEEE 2014 IEEE Sensors - Valencia,...

[IEEE 2014 IEEE Sensors - Valencia, Spain (2014.11.2-2014.11.5)] IEEE SENSORS 2014 Proceedings - Investigation of amorphous hydrogenated carbon layers as sacrificial structures for MEMS applications

Roth, Andre, Kautzsch, Thoralf, Vogt, Mirko, Stegemann, Maik, Frohlich, Heiko, Breitkopf, Cornelia
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2014
Language:
english
DOI:
10.1109/icsens.2014.6985050
File:
PDF, 1.17 MB
english, 2014
Conversion to is in progress
Conversion to is failed