[IEEE 2014 IEEE Sensors - Valencia, Spain (2014.11.2-2014.11.5)] IEEE SENSORS 2014 Proceedings - Investigation of amorphous hydrogenated carbon layers as sacrificial structures for MEMS applications
Roth, Andre, Kautzsch, Thoralf, Vogt, Mirko, Stegemann, Maik, Frohlich, Heiko, Breitkopf, CorneliaYear:
2014
Language:
english
DOI:
10.1109/icsens.2014.6985050
File:
PDF, 1.17 MB
english, 2014