[IEEE IEEE International Conference on Systems, Man, and Cybernetics - Nashville, TN, USA (8-11 Oct. 2000)] SMC 2000 Conference Proceedings. 2000 IEEE International Conference on Systems, Man and Cybernetics. 'Cybernetics Evolving to Systems, Humans, Organizations, and their Complex Interactions' (Cat. No.00CH37166) - Design of virtual production lines in back-end semiconductor manufacturing systems

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