[IEEE 2014 20th International Conference on Ion...

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[IEEE 2014 20th International Conference on Ion Implantation Technology (IIT) - Portland, OR, USA (2014.6.26-2014.7.4)] 2014 20th International Conference on Ion Implantation Technology (IIT) - Plasma potential measurement on ECRIS by using extracted ion beam

Kumakura, Sho, Kimura, Daiju, Yano, Keisuke, Imai, Youta, Nishiokada, Takuya, Sato, Fuminobu, Kato, Yushi, Iida, Toshiyuki
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Year:
2014
Language:
english
DOI:
10.1109/iit.2014.6940030
File:
PDF, 1007 KB
english, 2014
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