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[IEEE 2003 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2003) (Cat. No.03CH37453) - Las Vegas, Nevada, USA (Oct. 27-31, 2003)] Proceedings 2003 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2003) (Cat. No.03CH37453) - A model for precise alignment: nanometer positioning robotic stage (nprs)
Haskiya, W.K., Kennedy, D.Volume:
3
Year:
2003
Language:
english
DOI:
10.1109/iros.2003.1249187
File:
PDF, 210 KB
english, 2003