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Interferometric Scheme for High-Sensitivity Coaxial Focusing in Projection Lithography
Di, Chengliang, Hu, Song, Yan, Wei, Li, Yanli, Li, Guang, Tong, JunminVolume:
6
Language:
english
Journal:
IEEE Photonics Journal
DOI:
10.1109/jphot.2014.2326676
Date:
June, 2014
File:
PDF, 1.24 MB
english, 2014