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[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Thin Teflon-like films for eliminating adhesion in released polysilicon microstructures
Smith, B.K., Sniegowski, J.J., LaVigne, G.Volume:
1
Year:
1997
Language:
english
DOI:
10.1109/sensor.1997.613629
File:
PDF, 659 KB
english, 1997