[IEEE ICSE 2002. IEEE International Conference on Semiconductor Electronics. - Penang, Malaysia (19-21 Dec. 2002)] ICONIP '02. Proceedings of the 9th International Conference on Neural Information Processing. Computational Intelligence for the E-Age (IEEE Cat. No.02EX575) - A new PZT thin film preparation technique using solid oxygen-source target by RF reactive sputtering
Hana, S., Kaneta, R., Nasir, S., Sasaki, K., Hata, T.Year:
2002
Language:
english
DOI:
10.1109/smelec.2002.1217846
File:
PDF, 246 KB
english, 2002