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SPIE Proceedings [SPIE SPIE Nanoscience + Engineering - San Diego, California, United States (Sunday 9 August 2015)] Nanoengineering: Fabrication, Properties, Optics, and Devices XII - Nanoindentation for surface modification of nanofilms
Campo, Eva M., Dobisz, Elizabeth A., Eldada, Louay A., Luchenko, A. I., Melnichenko, M. M.Volume:
9556
Year:
2015
Language:
english
DOI:
10.1117/12.2187573
File:
PDF, 1.04 MB
english, 2015