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SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX, United States (Wednesday 25 October 1995)] Microelectronic Manufacturing Yield, Reliability, and Failure Analysis - Material processing and advanced well structures using high-energy implantation for EPI replacement
Wristers, Dirk, Eiting, Chris, Morris, Wes, Kwong, Dim-Lee, Fulford, JimVolume:
2635
Year:
1995
Language:
english
DOI:
10.1117/12.221455
File:
PDF, 414 KB
english, 1995