SPIE Proceedings [SPIE Photonics Taiwan - Taipei, Taiwan (Wednesday 26 July 2000)] Optoelectronic Materials and Devices II - Improved interferometric method for determination of the mechanical properties of metal oxide films
Tien, Chuen-Lin, Su, Yan-Kuin, Bhattacharya, Pallab, Lee, Cheng-chung, Chuang, KiePinVolume:
4078
Year:
2000
Language:
english
DOI:
10.1117/12.392173
File:
PDF, 701 KB
english, 2000