SPIE Proceedings [SPIE MOEMS-MEMS 2008 Micro and Nanofabrication - San Jose, CA (Saturday 19 January 2008)] MEMS Adaptive Optics II - Fabrication of single crystalline MEMS DM using anodic wafer bonding
Diouf, Alioune, Olivier, Scot S., Bifano, Thomas G., Gingras, Mike, Stewart, Jason B., Kubby, Joel A., Bifano, Thomas G., Cornelissen, Steven, Bierden, PaulVolume:
6888
Year:
2008
Language:
english
DOI:
10.1117/12.763124
File:
PDF, 436 KB
english, 2008