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SPIE Proceedings [SPIE Integrated Optoelectronic Devices 2008 - San Jose, CA (Saturday 19 January 2008)] Emerging Liquid Crystal Technologies III - Excimer laser projection photoablation and lift-off process for patterning of indium-tin-oxide for cost-effective fabrication of flat-panel displays
Chae, Junghun, Chien, Liang-Chy, Appasamy, Sreeram, Jain, KantiVolume:
6911
Year:
2008
Language:
english
DOI:
10.1117/12.767827
File:
PDF, 1.78 MB
english, 2008