SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, CA (Sunday 2 August 2009)] Soft X-Ray Lasers and Applications VIII - Tabletop soft x-ray lithography
Marconi, M. C., Dunn, James, Tallents, Gregory J., Wachulak, P. W., Urbanski, L., Isoyan, Artak, Jiang, Fan, Cheng, Yang Chun, Rocca, J. J., Menoni, C. S., Cerrina, F.Volume:
7451
Year:
2009
Language:
english
DOI:
10.1117/12.825509
File:
PDF, 837 KB
english, 2009