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SPIE Proceedings [SPIE MOEMS-MEMS - San Francisco, California (Saturday 23 January 2010)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III - Modification of conformal-evaporated-film-by-rotation technique to improve uniformity of replicas of nonplanar biotemplates
Schoenfeld, Winston V., Pulisfer, Drew Patrick, Lakhtakia, Akhlesh, Wang, Jian J., Loncar, Marko, Martín-Palma, Raúl José, Suleski, Thomas J.Volume:
7591
Year:
2010
Language:
english
DOI:
10.1117/12.840437
File:
PDF, 7.46 MB
english, 2010