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[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Chemical performance and high temperature characterization of micromachined chemical reactors
Srinivasan, R., Firebaugh, S.L., Hsing, I.-M., Ryley, J., Harold, M.P., Jensen, K.F., Schmidt, M.A.Volume:
1
Year:
1997
Language:
english
DOI:
10.1109/sensor.1997.613608
File:
PDF, 666 KB
english, 1997