[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - Pull-in suppression and torque magnification in parallel plate electrostatic actuators with side electrodes
Kudrle, T.D., Shedd, G.M., Wang, C.C., Hsiao, J.C., Bancu, M.G., Kirkos, G.A., Yazdi, N., Waelti, M., Sane, H., Mastrangelo, C.H.Volume:
1
Year:
2003
Language:
english
DOI:
10.1109/sensor.2003.1215328
File:
PDF, 286 KB
english, 2003