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Dynamic Force Characterization Microscopy Based on Integrated Nanorobotic AFM and SEM System for Detachment Process Study
Shen, Yajing, Nakajima, Masahiro, Zhang, Zhenhai, Fukuda, ToshioVolume:
20
Language:
english
Journal:
IEEE/ASME Transactions on Mechatronics
DOI:
10.1109/tmech.2015.2413779
Date:
December, 2015
File:
PDF, 832 KB
english, 2015