![](/img/cover-not-exists.png)
The Annealing Behavior of Si–F Bonding Structure of Amorphous Si–F Films
Yamamoto, Keiichi, Tsuji, Mikio, Washio, Katsuyoshi, Kasahara, Hajime, Abe, KenjiVolume:
52
Journal:
Journal of the Physical Society of Japan
DOI:
10.1143/JPSJ.52.925
Date:
March, 1983
File:
PDF, 1.08 MB
1983