[IEEE International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 - Stockholm, Sweden (June 25-29, 1995)] Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 - A Micromachined Permalloy Magnetic Actuator Array for Micro Robotics Assembly Systems
Chang Liu,, Tsao, T., Yu-Chong Tai,, Wenheng Liu,, Will, P., Chih-Ming Ho,Volume:
1
Year:
1995
Language:
english
DOI:
10.1109/SENSOR.1995.717185
File:
PDF, 774 KB
english, 1995