![](/img/cover-not-exists.png)
[IEEE IEEE Ultrasonics Symposium, 2005. - Rotterdam, The Netherlands (18-21 Sept. 2005)] IEEE Ultrasonics Symposium, 2005. - Low temperature bonding of interface acoustic waves resonators on silicon wafers
Majjad, H., Laude, V., Ballandras, S.Volume:
2
Year:
2005
Language:
english
DOI:
10.1109/ultsym.2005.1603093
File:
PDF, 1.03 MB
english, 2005