SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Alternative Lithographic Technologies V - Block-copolymer healing of simple defects in a chemoepitaxial template
Patrone, Paul N., Tong, William M., Resnick, Douglas J., Gallatin, Gregg M.Volume:
8680
Year:
2013
Language:
english
DOI:
10.1117/12.2011656
File:
PDF, 368 KB
english, 2013