SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

  • Main
  • SPIE Proceedings [SPIE SPIE Advanced...

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Alternative Lithographic Technologies V - Block-copolymer healing of simple defects in a chemoepitaxial template

Patrone, Paul N., Tong, William M., Resnick, Douglas J., Gallatin, Gregg M.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
8680
Year:
2013
Language:
english
DOI:
10.1117/12.2011656
File:
PDF, 368 KB
english, 2013
Conversion to is in progress
Conversion to is failed