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SPIE Proceedings [SPIE International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013) - Singapore, Singapore (Tuesday 9 April 2013)] International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013) - To develop a high speed auto-alignment system by dual machine vision based alignment system
Chen, Chun-Jen, Quan, Chenggen, Qian, Kemao, Jywe, Wenyuh, Teng, Yunfeng, Asundi, Anand, Chen, Yi-Ju, Hung, Min-WeiVolume:
8769
Year:
2013
Language:
english
DOI:
10.1117/12.2018829
File:
PDF, 660 KB
english, 2013