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SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Optical Measurement Systems for Industrial Inspection VIII - Lateral location error compensation algorithm for measuring aspheric surfaces by sub-aperture stitching interferometry
Zhao, Zixin, Lehmann, Peter H., Osten, Wolfgang, Zhao, Hong, Gu, Feifei, Albertazzi, Armando, Zhang, LuVolume:
8788
Year:
2013
Language:
english
DOI:
10.1117/12.2020427
File:
PDF, 643 KB
english, 2013