SPIE Proceedings [SPIE SPIE Optical Metrology 2013 -...

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SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Optical Measurement Systems for Industrial Inspection VIII - Concept, realization and performance of a two-beam phase-shifting point diffraction interferometer

Voznesenskiy, Nikolay, Lehmann, Peter H., Osten, Wolfgang, Voznesenskaia, Mariia, Petrova, Natalia, Albertazzi, Armando, Abels, Artur
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Volume:
8788
Year:
2013
Language:
english
DOI:
10.1117/12.2020618
File:
PDF, 1.15 MB
english, 2013
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